Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390948 | Film forming apparatus | Shigehiro Miura, Hiroyuki Akama, Koji Yoshii | 2022-07-19 |
| 11328901 | Deposition method | Shigehiro Miura, Takehiro FUKADA, Yoshitaka Enoki, Yuji Sawada | 2022-05-10 |
| 10668512 | Particle removal method and substrate processing method | Jun Sato, Takashi Chiba | 2020-06-02 |
| 10385453 | Film forming apparatus | Shigehiro Miura, Hiroyuki Akama, Koji Yoshii | 2019-08-20 |
| 10103009 | Plasma processing device and operation method | Shigehiro Miura, Hitoshi Kato, Jun Sato, Takeshi Kobayashi | 2018-10-16 |
| 9941343 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2018-04-10 |
| 9865454 | Substrate processing apparatus and substrate processing method | Hitoshi Kato, Hiroyuki Kikuchi, Jun Sato, Shigehiro Miura | 2018-01-09 |
| 9711582 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2017-07-18 |
| 9376751 | Plasma processing device and operation method | Shigehiro Miura, Hitoshi Kato, Jun Sato, Takeshi Kobayashi | 2016-06-28 |
| 9337243 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2016-05-10 |
| 9082677 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2015-07-14 |
| 8563096 | Vertical film formation apparatus and method for using same | Masanobu Matsunaga, Pao-Hwa Chou, Masayuki Hasegawa, Kazuhide Hasebe | 2013-10-22 |
| 8378443 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2013-02-19 |
| 8298628 | Low temperature deposition of silicon-containing films | Liu Yang, Xinjian Lei, Bing Han, Manchao Xiao, Eugene Joseph Karwacki, Jr. +3 more | 2012-10-30 |
| 8216648 | Film formation method and apparatus | Masanobu Matsunaga, Keisuke Suzuki, Jaehyuk Jang, Pao-Hwa Chou, Masayuki Hasegawa +1 more | 2012-07-10 |
| 8058699 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2011-11-15 |
| 8012787 | Photovoltaic device and manufacturing method thereof | Kimikazu Hazumi, Akihiro Takami, Hiroaki Morikawa, Kunihiko Nishimura | 2011-09-06 |
| 7953512 | Substrate processing system, control method for substrate processing apparatus and program stored on medium | Yuichi Takenaga, Tatsuya Yamaguchi, Wenling Wang, Toshihiko Takahashi | 2011-05-31 |
| 7786544 | Area sensor and display apparatus provided with an area sensor | Shunpei Yamazaki, Jun Koyama, Hajime Kimura, Yu Yamazaki | 2010-08-31 |
| 7594479 | Plasma CVD device and discharge electrode | Naoto Kusumoto, Hisato Shinohara | 2009-09-29 |
| 7528057 | Laser annealing method and laser annealing device | Naoto Kusumoto, Toru Takayama | 2009-05-05 |
| 7510901 | Conveyor device and film formation apparatus for a flexible substrate | Naoto Kusumoto, Hisato Shinohara | 2009-03-31 |
| 7462376 | CVD method for forming silicon nitride film | Hitoshi Kato, Kohei Fukushima, Junya Hiraka | 2008-12-09 |
| 7384828 | Semiconductor film, semiconductor device and method of their production | Taketomi Asami, Mitsuhiro Ichijo, Noriyoshi Suzuki, Hideto Ohnuma | 2008-06-10 |
| 7365004 | Method for manufacturing semiconductor device | Hiroki Adachi, Kazuo Nishi, Yukihiro Isobe, Hisato Shinohara | 2008-04-29 |