Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159548 | Semiconductor processing system including vaporizer and method for using same | Tsuneyuki Okabe, Hitoshi Katoh, Hiroyuki Kikuchi | 2015-10-13 |
| 7462376 | CVD method for forming silicon nitride film | Hitoshi Kato, Kohei Fukushima, Masato Yonezawa | 2008-12-09 |