Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776105 | Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus | Tsuyoshi Moriya, Tokio Toyama, Michihiro Takahashi, Takuya Mori | 2023-10-03 |
| 11328901 | Deposition method | Shigehiro Miura, Masato Yonezawa, Takehiro FUKADA, Yuji Sawada | 2022-05-10 |
| 8778812 | Apparatus and method of forming thin film including adsorption step and reaction step | Haruhiko Furuya, Jun Ogawa, Masahiko Kaminishi, Yoshinobu Ise | 2014-07-15 |