Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8962495 | Film deposition method | Hiroaki Ikegawa, Masahiko Kaminishi, Jun Ogawa | 2015-02-24 |
| 8778812 | Apparatus and method of forming thin film including adsorption step and reaction step | Haruhiko Furuya, Jun Ogawa, Masahiko Kaminishi, Yoshitaka Enoki | 2014-07-15 |