KS

Kentarou SERA

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,090,344 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8642486 Thin film forming method, thin film forming apparatus, and program Toshiyuki Ikeuchi, Pao-Hwa Chou, Kazuya Yamamoto 2014-02-04