Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9562285 | Film forming method, film forming apparatus and storage medium | Keisuke Suzuki, Hiroki Murakami, Shingo Hishiya, Minoru Obata | 2017-02-07 |
| 9142403 | Method of forming boron-containing silicon oxycarbonitride film and method of forming silicon oxycarbonitride film | Keisuke Suzuki | 2015-09-22 |
| 9076649 | Film forming method and apparatus | Keisuke Suzuki, Volker Hemel, Bernhard Zobel | 2015-07-07 |
| 9034718 | Film forming method for forming boron-added silicon nitride film | Keisuke Suzuki, Yuichiro Morozumi | 2015-05-19 |
| 8871655 | Method of forming silicon oxycarbonitride film | Keisuke Suzuki, Byoung Hoon Lee, Eun-Jo Lee, Sung Duk SON, Jae Hyuk Jang +1 more | 2014-10-28 |
| 8753717 | Film forming method and film forming apparatus | Keisuke Suzuki, Yoshitaka Mori | 2014-06-17 |
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Yamato Tonegawa, Pao-Hwa Chou, Kazuhide Hasebe, Tetsuya Shibata | 2011-10-11 |
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Pao-Hwa Chou, Kota Umezawa, Hao-Hsiang Chang | 2011-06-21 |