Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334380 | Boat transfer method and heat treatment apparatus | Shingo Hishiya, Hiroaki Ikegawa, Volker Hemel, Bernhard Zobel | 2025-06-17 |
| 12018366 | Substrate processing apparatus and cleaning method | Shingo Hishiya | 2024-06-25 |
| 11786946 | Cleaning method and film forming apparatus | Shingo Hishiya, Akinobu Kakimoto | 2023-10-17 |
| 11725281 | Gas introduction structure, thermal processing apparatus and gas supply method | Shingo Hishiya, Masayuki Kitamura, Satoru Ogawa | 2023-08-15 |
| 8871655 | Method of forming silicon oxycarbonitride film | Keisuke Suzuki, Kentaro Kadonaga, Byoung Hoon Lee, Eun-Jo Lee, Jae Hyuk Jang +1 more | 2014-10-28 |