Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136668 | Film-forming apparatus and film-forming method | Tatsuya Yamaguchi, Yoji IIZUKA | 2021-10-05 |
| 11056349 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2021-07-06 |
| 10960435 | Film forming apparatus, film forming method, and storage medium | Makoto Fujikawa, Hiroyuki Hashimoto, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-03-30 |
| 10790135 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Syuji NOZAWA, Makoto Fujikawa | 2020-09-29 |
| 10755971 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-08-25 |
| 10748782 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Makoto Fujikawa, Yoshihiro Hirota, Rong-Ching Yang, Tomonari Yamamoto | 2020-08-18 |
| 10629448 | Method of manufacturing semiconductor device and vacuum processing apparatus | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-04-21 |
| 10593556 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2020-03-17 |
| 10490405 | Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-11-26 |
| 10446438 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-10-15 |
| 9162252 | Film forming method | Tatsuya Yamaguchi | 2015-10-20 |
| 8778815 | Film forming method | Tatsuya Yamaguchi | 2014-07-15 |
| 8383522 | Micro pattern forming method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita | 2013-02-26 |
| 8168375 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita | 2012-05-01 |
| 7989354 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita | 2011-08-02 |
| 7754622 | Patterning method utilizing SiBN and photolithography | Pao-Hwa Chou, Kazuhide Hasebe, Shigeru Nakajima, Yasushi Akasaka, Mitsuaki Iwashita | 2010-07-13 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura, Yuuichi Mikata +4 more | 1997-06-10 |
| 5500388 | Heat treatment process for wafers | Tomoyuki Ohbu, Hiroaki Ikegawa, Ken Nakao, Yoshiyuki Fujita, Tsutomu Haraoka +3 more | 1996-03-19 |
| 5380370 | Method of cleaning reaction tube | Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura, Yuuichi Mikata +3 more | 1995-01-10 |
| 5316472 | Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus | Isao Siratani, Yutaka Simada, Hiroki Fukusima, Hirofumi Kitayama, Akimichi Yonekura +1 more | 1994-05-31 |
| 5252133 | Vertically oriented CVD apparatus including gas inlet tube having gas injection holes | Shinji Miyazaki, Yuichi Mikata, Takahiko Moriya, Motohiko Nishimura | 1993-10-12 |