Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5951772 | Vacuum processing apparatus | Kimihiro Matsuse, Hatsuo Osada, Sumi Tanaka | 1999-09-14 |
| 5785796 | Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus | — | 1998-07-28 |
| 5711815 | Film forming apparatus and film forming method | Tomihiro Yonenaga | 1998-01-27 |
| 5647945 | Vacuum processing apparatus | Kimihiro Matsuse, Hatsuo Osada, Sumi Tanaka | 1997-07-15 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Yasuo Imamura, Toshiharu Nishimura, Yuuichi Mikata +4 more | 1997-06-10 |
| 5616208 | Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus | — | 1997-04-01 |
| 5525160 | Film deposition processing device having transparent support and transfer pins | Sumi Tanaka, Yuichiro Fujikawa, Tomihiro Yonenaga | 1996-06-11 |
| 5380370 | Method of cleaning reaction tube | Reiji Niino, Yoshiyuki Fujita, Yasuo Imamura, Toshiharu Nishimura, Yuuichi Mikata +3 more | 1995-01-10 |
| 5180692 | Method for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluoride | Shigehito Ibuka | 1993-01-19 |