Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5254176 | Method of cleaning a process tube | Chitoshi Nogami | 1993-10-19 |
| 5180692 | Method for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluoride | Hideki Lee | 1993-01-19 |
| 5070275 | Ion implantation device | Hisashi Kondo, Shigeru Sagami, Koji Sumi | 1991-12-03 |
| 4958061 | Method and apparatus for heat-treating a substrate | Tsuyoshi Wakabayashi | 1990-09-18 |