Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5421902 | Non-plasma cleaning method for semiconductor manufacturing apparatus | Hideki Odajima, Masanori Suzuki, Manabu Saeda | 1995-06-06 |
| 5254176 | Method of cleaning a process tube | Shigehito Ibuka | 1993-10-19 |