Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403498 | Method and device for treating substrate | Takenobu Matsuo, Teruyuki Hayashi, Misako Saito | 2002-06-11 |
| 6337365 | Electronic/electric components used in clean room and substrate treatment apparatus | Takenobu Matsuo, Misako Saito, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2002-01-08 |
| 6077894 | Instrument and mounting equipment used in clean room | Misako Saito, Takenobu Matsuo, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2000-06-20 |
| 5514196 | Air cleaning apparatus | Takashi Tanahashi, Syuji Moriya, Takenobu Matsuo | 1996-05-07 |
| 5441076 | Processing apparatus using gas | Shuji Moriya, Takenobu Matsuo, Kazutoshi Miura, Takahiro Mori | 1995-08-15 |
| 5439026 | Processing apparatus and flow control arrangement therefor | Shuji Moriya, Takenobu Matsuo | 1995-08-08 |
| 5421365 | Flow control apparatus | Takenobu Matsuo, Shuji Moriya | 1995-06-06 |
| 5307568 | Gas supply system | Takenobu Matsuo, Shjui Moriya | 1994-05-03 |
| 5294280 | Gas measuring device and processing apparatus provided with the gas measuring device | Takenobu Matsuo, Shuji Moriya, Hidenobu Arimitsu | 1994-03-15 |
| 4958061 | Method and apparatus for heat-treating a substrate | Shigehito Ibuka | 1990-09-18 |