Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7844433 | System, method and program for designing a utility facility and method for manufacturing a product by the utility facility | Toshikatsu Masuda, Toshinori Shinki, Shuichi Samata | 2010-11-30 |
| 7632382 | Plating apparatus | Koji Saito, Katsumi Sameshima | 2009-12-15 |
| 7497908 | Film coating unit and film coating method | Tsuyoshi Mizuno, Kimihide Saito | 2009-03-03 |
| 7145667 | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, semiconductor device manufacturing system, and cleaning method for semiconductor device manufacturing apparatus | Akihito Yamamoto, Takashi Nakao, Yoshitaka Tsunashima | 2006-12-05 |
| 6989281 | Cleaning method for a semiconductor device manufacturing apparatus | Akihito Yamamoto, Takashi Nakao, Yoshitaka Tsunashima | 2006-01-24 |
| 6983191 | Semiconductor manufacturing line availability evaluating system and design system | — | 2006-01-03 |
| 6944572 | Apparatus for predicting life of rotary machine and equipment using the same | Yukihiro Ushiku, Tsunetoshi Arikado, Shuichi Samata, Takashi Nakao | 2005-09-13 |
| 6929991 | Reliable semiconductor device and method of manufacturing the same | Shuji Katsui, Hiroshi Akahori | 2005-08-16 |
| 6867054 | Method of manufacturing a semiconductor device | — | 2005-03-15 |
| 6865513 | Method for predicting life of rotary machine and determining repair timing of rotary machine | Yukihiro Ushiku, Tsunetoshi Arikado, Shuichi Samata, Takashi Nakao | 2005-03-08 |
| 6772045 | System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device | Shuji Katsui, Masayuki Tanaka, Masaki Kamimura, Hiroshi Akahori, Ichiro Mizushima +4 more | 2004-08-03 |
| 6713824 | Reliable semiconductor device and method of manufacturing the same | Shuji Katsui, Hiroshi Akahori | 2004-03-30 |
| 6329303 | Thin film forming method, thin film forming apparatus and method for manufacturing semiconductor device | — | 2001-12-11 |
| 6171977 | Semiconductor device applied to composite insulative film manufacturing method thereof | Yoshio Kasai, Takashi Suzuki, Takanori Tsuda, Hiroshi Akahori, Akihito Yamamoto | 2001-01-09 |
| 6163050 | Semiconductor device having insulation film whose breakdown voltage is improved and its manufacturing method | Kiyoshi Hisatomi, Sakae Funo, Katsunori Ishihara | 2000-12-19 |
| 6093243 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 2000-07-25 |
| 6066872 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 2000-05-23 |
| 5879447 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 1999-03-09 |
| 5838056 | Semiconductor device applied to composite insulative film and manufacturing method thereof | Yoshio Kasai, Takashi Suzuki, Takanori Tsuda, Hiroshi Akahori, Akihito Yamamoto | 1998-11-17 |
| 5766785 | Method and apparatus for manufacturing a semiconductor device | Takashi Nakao, Yoshitaka Tsunashima | 1998-06-16 |
| 5746581 | Method and apparatus for evacuating vacuum system | Katsuya Okumura, Manabu Tsujimura, Yoshio Ando | 1998-05-05 |
| 5714399 | Semiconductor device having insulation film whose breakdown voltage is improved and its manufacturing method | Kiyoshi Hisatomi, Sakae Funo, Katsunori Ishihara | 1998-02-03 |
| 5702531 | Apparatus for forming a thin film | — | 1997-12-30 |
| 5702529 | Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same | Katsunori Ishihara, Katsuya Okumura | 1997-12-30 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura +4 more | 1997-06-10 |