Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7831330 | Process control system, process control method, and method of manufacturing electronic apparatus | Junji Sugamoto, Kazutaka Akiyama, Shoichi Harakawa | 2010-11-09 |
| 7702413 | Semiconductor device manufacturing system and method for manufacturing semiconductor devices including calculating oxide film thickness using real time simulator | Akira Ogawa, Hidenori Kakinuma, Shunji Shuto, Masahiro Abe, Tatsuo Akiyama +1 more | 2010-04-20 |
| 7700381 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Shinichi Nitta +8 more | 2010-04-20 |
| 7596421 | Process control system, process control method, and method of manufacturing electronic apparatus | Junji Sugamoto, Kazutaka Akiyama, Shoichi Harakawa | 2009-09-29 |
| 7588973 | Semiconductor device and method of manufacturing the same | — | 2009-09-15 |
| 7531462 | Method of inspecting semiconductor wafer | Katsujiro Tanzawa, Norihiko Tsuchiya, Junji Sugamoto | 2009-05-12 |
| 7529634 | Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing | Kunihiro Mitsutake | 2009-05-05 |
| 7463941 | Quality control system, quality control method, and method of lot-to-lot wafer processing | Akira Ogawa, Tomomi Ino | 2008-12-09 |
| 7413914 | Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor device | Mitsutoshi Nakamura | 2008-08-19 |
| 7361960 | Semiconductor device and method of manufacturing the same | Yoshitaka Tsunashima, Kiyotaka Miyano | 2008-04-22 |
| 7324855 | Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server | Hidenori Kakinuma, Tsutomu Miki, Junji Sugamoto, Akira Ogawa, Yoshinori Ookawauchi +2 more | 2008-01-29 |
| 7314766 | Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus | Junji Sugamoto, Norihiko Tsuchiya, Katsujiro Tanzawa | 2008-01-01 |
| 7221991 | System and method for monitoring manufacturing apparatuses | Hiroshi Matsushita, Tomonobu Noda, Kenichi Kadota, Junji Sugamoto | 2007-05-22 |
| 7222026 | Equipment for and method of detecting faults in semiconductor integrated circuits | Hiroshi Matsushita, Kunihiro Mitsutake | 2007-05-22 |
| 7188049 | System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device | Norihiko Tsuchiya | 2007-03-06 |
| 7082346 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method | Kazuo Saki | 2006-07-25 |
| 7065469 | Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machine | Shuichi Samata, Takeo Furuhata, Akihito Yamamoto, Takashi Nakao | 2006-06-20 |
| 7057259 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Shinichi Nitta +8 more | 2006-06-06 |
| 6944572 | Apparatus for predicting life of rotary machine and equipment using the same | Tsunetoshi Arikado, Shuichi Samata, Takashi Nakao, Yuuichi Mikata | 2005-09-13 |
| 6937963 | Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff | Ken Ishii, Takashi Nakao, Shuichi Samata | 2005-08-30 |
| 6930359 | Semiconductor device and method of manufacturing the same | — | 2005-08-16 |
| 6909993 | Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system | Takashi Nakao, Shuichi Samata, Hiroshi Akahori, Ken Ishii | 2005-06-21 |
| 6898551 | System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus | Shuichi Samata, Akihito Yamamoto, Takashi Nakao, Takeo Furuhata | 2005-05-24 |
| 6885972 | Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system | Shuichi Samata, Takeo Furuhata, Takashi Nakao, Ken Ishii | 2005-04-26 |
| 6885950 | Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing | Kunihiro Mitsutake | 2005-04-26 |