Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008426 | Etching method and etchant | Takehiro Nakai, Sakae Funo, Junichi Shimada, Youko Itabashi | 2018-06-26 |
| 7700381 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2010-04-20 |
| 7531462 | Method of inspecting semiconductor wafer | Katsujiro Tanzawa, Junji Sugamoto, Yukihiro Ushiku | 2009-05-12 |
| 7314766 | Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus | Junji Sugamoto, Yukihiro Ushiku, Katsujiro Tanzawa | 2008-01-01 |
| 7188049 | System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device | Yukihiro Ushiku | 2007-03-06 |
| 7057259 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2006-06-06 |
| 6963630 | Method for evaluating an SOI substrate, evaluation processor, and method for manufacturing a semiconductor device | Kaori Umezawa | 2005-11-08 |
| 6919260 | Method of manufacturing a substrate having shallow trench isolation | Kaori Umezawa, Yoshiaki Matsushita, Hiroyuki Kamijou, Atsushi Yagishita, Tsunehiro KITA | 2005-07-19 |
| 6320655 | Defect-position identifying method for semiconductor substrate | Hiroshi Matsushita, Youko Toyomaru | 2001-11-20 |
| 6146911 | Semiconductor wafer and method of manufacturing the same | Hiroshi Matsushita | 2000-11-14 |
| 5994756 | Substrate having shallow trench isolation | Kaori Umezawa, Yoshiaki Matsushita, Hiroyuki Kamijou, Atsushi Yagishita, Tsunehiro KITA | 1999-11-30 |
| 5755877 | Method of growing thin film on semiconductor substrate and its manufacturing apparatus | Takanobu Kamakura | 1998-05-26 |
| 5738942 | Semiconductor silicon wafer and process for producing it | Atsuko Kubota, Masakatu Kojima, Shuichi Samata, Masanori Numano, Yoshihiro Ueno | 1998-04-14 |
| 5739575 | Dielectrically isolated substrate and method for manufacturing the same | Masanori Numano, Hiroyasu Kubota, Yoshiaki Matsushita, Yoshiki Hayashi, Yukihiro Ushiku +4 more | 1998-04-14 |
| 5675176 | Semiconductor device and a method for manufacturing the same | Yukihiro Ushiku, Atsushi Yagishita, Satoshi Inaba, Minoru Takahashi, Masanori Numano +4 more | 1997-10-07 |
| 5534294 | Process for producing Semiconductor silicon wafer | Atsuko Kubota, Masakatu Kojima, Shuichi Samata, Masanori Numano, Yoshihiro Ueno | 1996-07-09 |
| 5148457 | System for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of X-rays fluorescence | Atsuko Kubota, Shuichi Samata, Yoshiaki Matsushita, Mokuji Kageyama | 1992-09-15 |
| 5071776 | Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface | Yoshiaki Matsushita, Moriya Miyashita, Makiko Wakatsuki, Atsuko Kubota | 1991-12-10 |