Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7979154 | Method and system for managing semiconductor manufacturing device | Hiroshi Matsushita, Masafumi Asano | 2011-07-12 |
| 7970486 | Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus | Hiroshi Matsushita, Masafumi Asano | 2011-06-28 |
| 7831330 | Process control system, process control method, and method of manufacturing electronic apparatus | Yukihiro Ushiku, Kazutaka Akiyama, Shoichi Harakawa | 2010-11-09 |
| 7742834 | Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same | Hiroshi Matsushita, Masafumi Asano | 2010-06-22 |
| 7700381 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2010-04-20 |
| 7596421 | Process control system, process control method, and method of manufacturing electronic apparatus | Yukihiro Ushiku, Kazutaka Akiyama, Shoichi Harakawa | 2009-09-29 |
| 7531462 | Method of inspecting semiconductor wafer | Katsujiro Tanzawa, Norihiko Tsuchiya, Yukihiro Ushiku | 2009-05-12 |
| 7529631 | Defect detection system, defect detection method, and defect detection program | Hiroshi Matsushita, Yasutaka Arakawa | 2009-05-05 |
| 7324855 | Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server | Yukihiro Ushiku, Hidenori Kakinuma, Tsutomu Miki, Akira Ogawa, Yoshinori Ookawauchi +2 more | 2008-01-29 |
| 7314766 | Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus | Norihiko Tsuchiya, Yukihiro Ushiku, Katsujiro Tanzawa | 2008-01-01 |
| 7221991 | System and method for monitoring manufacturing apparatuses | Hiroshi Matsushita, Tomonobu Noda, Kenichi Kadota, Yukihiro Ushiku | 2007-05-22 |
| 7057259 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2006-06-06 |