Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7831330 | Process control system, process control method, and method of manufacturing electronic apparatus | Junji Sugamoto, Yukihiro Ushiku, Kazutaka Akiyama | 2010-11-09 |
| 7630052 | Exposure processing system, exposure processing method and method for manufacturing a semiconductor device | Takuya Kono, Nobuhiro Komine, Tatsuhiko Higashiki, Makato Ikeda | 2009-12-08 |
| 7596421 | Process control system, process control method, and method of manufacturing electronic apparatus | Junji Sugamoto, Yukihiro Ushiku, Kazutaka Akiyama | 2009-09-29 |
| 7556899 | System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device | Makoto Ikeda, Takuya Kono | 2009-07-07 |
| 6925343 | FLOW CONVERSION SYSTEM FOR A MANUFACTURING PROCESS, METHOD FOR CONVERTING A PROCESS FLOW, SYSTEM FOR CONTROLLING MANUFACTURING PROCESS, METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND A COMPUTER PROGRAM PRODUCT | Yuichi Satoguchi, Takeshi Asamura, Koji Kitajima | 2005-08-02 |
| 6853870 | Semiconductor processing process control system and its control method | Makoto Ikeda, Etsuo Fukuda | 2005-02-08 |
| 6745094 | Semiconductor processing process control system and its control method | Makoto Ikeda, Etsuo Fukuda | 2004-06-01 |
| 6505090 | Semiconductor device manufacturing method, manufacturing system, support system and recording medium storing program of and data for the manufacture method | — | 2003-01-07 |