Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973281 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Takamitsu Nagai, Kenichi Kadota, Hisaki Kozaki | 2011-07-05 |
| 7573066 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Takamitsu Nagai, Kenichi Kadota, Hisaki Kozaki | 2009-08-11 |
| 7221991 | System and method for monitoring manufacturing apparatuses | Hiroshi Matsushita, Kenichi Kadota, Junji Sugamoto, Yukihiro Ushiku | 2007-05-22 |
| 6711733 | System for and method of evaluating mask patterns | — | 2004-03-23 |
| 6671861 | Manufacturing process evaluation method for semiconductor device and pattern shape evaluation apparatus using the evaluation method | — | 2003-12-30 |
| 6657735 | Method of evaluating critical locations on a semiconductor apparatus pattern | Tatsuo Akiyama | 2003-12-02 |
| 6583870 | Simulated defective wafer and pattern defect inspection recipe preparing method | — | 2003-06-24 |