Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973281 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Takamitsu Nagai, Tomonobu Noda, Kenichi Kadota | 2011-07-05 |
| 7573066 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Takamitsu Nagai, Tomonobu Noda, Kenichi Kadota | 2009-08-11 |