Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887845 | Method for producing three-dimensional structure, method for producing vertical transistor, vertical transistor wafer, and vertical transistor substrate | Kazutaka KAMIJO, Etsuo Fukuda, Takashi Ishikawa, Koji Izunome, Takao Sakamoto +1 more | 2024-01-30 |
| 7700381 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2010-04-20 |
| 7057259 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2006-06-06 |
| 6222252 | Semiconductor substrate and method for producing the same | Masanori Numano | 2001-04-24 |
| 6037270 | Method of manufacturing semiconductor device and methods of processing, analyzing and manufacturing its substrate | Mokuji Kageyama | 2000-03-14 |
| 5951755 | Manufacturing method of semiconductor substrate and inspection method therefor | Masanobu Ogino, Tadahide Hoshi, Masanori Numano, Shuichi Samata, Akiko Sekihara +1 more | 1999-09-14 |
| 5508800 | Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate | Hachiro Hiratsuka, Atsuko Kubota, Shuichi Samata, Masanori Numano, Hiroyuki Fukui | 1996-04-16 |
| 5271796 | Method and apparatus for detecting defect on semiconductor substrate surface | Mokuji Kageyama, Hachiro Hiratsuka | 1993-12-21 |
| 5071776 | Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface | Yoshiaki Matsushita, Makiko Wakatsuki, Norihiko Tsuchiya, Atsuko Kubota | 1991-12-10 |
| 4980300 | Gettering method for a semiconductor wafer | Shintaro Yoshii, Keiko SAKUMA | 1990-12-25 |
| 4971920 | Gettering method for semiconductor wafers | Ayako Maeda | 1990-11-20 |