Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5738942 | Semiconductor silicon wafer and process for producing it | Masakatu Kojima, Norihiko Tsuchiya, Shuichi Samata, Masanori Numano, Yoshihiro Ueno | 1998-04-14 |
| 5534294 | Process for producing Semiconductor silicon wafer | Masakatu Kojima, Norihiko Tsuchiya, Shuichi Samata, Masanori Numano, Yoshihiro Ueno | 1996-07-09 |
| 5508800 | Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate | Moriya Miyashita, Hachiro Hiratsuka, Shuichi Samata, Masanori Numano, Hiroyuki Fukui | 1996-04-16 |
| 5148457 | System for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of X-rays fluorescence | Norihiko Tsuchiya, Shuichi Samata, Yoshiaki Matsushita, Mokuji Kageyama | 1992-09-15 |
| 5071776 | Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface | Yoshiaki Matsushita, Moriya Miyashita, Makiko Wakatsuki, Norihiko Tsuchiya | 1991-12-10 |
| 4862000 | Method for predicting density of micro crystal defects in semiconductor element from silicon wafer used in the manufacture of the element, and infrared absorption measurement apparatus for this method | Yoshiaki Matsushita, Yoshiaki Ohwada | 1989-08-29 |