Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6274505 | Etching method, etching apparatus and analyzing method | Shoko Ito | 2001-08-14 |
| 6165872 | Semiconductor device and its manufacturing method | — | 2000-12-26 |
| 6037270 | Method of manufacturing semiconductor device and methods of processing, analyzing and manufacturing its substrate | Moriya Miyashita | 2000-03-14 |
| 5939770 | Semiconductor device and its manufacturing method | — | 1999-08-17 |
| 5574307 | Semiconductor device and method of producing the same | Yoshiaki Matsushita | 1996-11-12 |
| 5395446 | Semiconductor treatment apparatus | Kiyoshi Yoshikawa, Ayako Shimazaki | 1995-03-07 |
| 5271796 | Method and apparatus for detecting defect on semiconductor substrate surface | Moriya Miyashita, Hachiro Hiratsuka | 1993-12-21 |
| 5148457 | System for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of X-rays fluorescence | Atsuko Kubota, Norihiko Tsuchiya, Shuichi Samata, Yoshiaki Matsushita | 1992-09-15 |
| 5055413 | Method of measuring impurities in oxide films using a meltable sample collection stick | Ayako Maeda | 1991-10-08 |
| 4990459 | Impurity measuring method | Ayako Maeda, Shintaro Yoshii, Masanobu Ogino | 1991-02-05 |