Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183433 | Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer | Sayaka MAKISE, Noritomo Mitsugi, Sumio Miyazaki | 2021-11-23 |
| 11047800 | Method of evaluating carbon concentration of silicon sample, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer | Kazutaka Eriguchi, Syun Sasaki | 2021-06-29 |
| 10935510 | Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer | Kazutaka Eriguchi, Noritomo Mitsugi, Ayumi Masada | 2021-03-02 |
| 10676840 | Method of evaluating manufacturing process of silicon material and manufacturing method of silicon material | Noritomo Mitsugi, Kazutaka Eriguchi, Ayumi Masada | 2020-06-09 |
| 8173523 | Method of removing heavy metal in semiconductor substrate | Noritomo Mitsugi, Masataka Hourai, Kiyoshi Nagai, Kei Matsumoto | 2012-05-08 |
| 7844433 | System, method and program for designing a utility facility and method for manufacturing a product by the utility facility | Toshikatsu Masuda, Toshinori Shinki, Yuuichi Mikata | 2010-11-30 |
| 7065469 | Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machine | Takeo Furuhata, Yukihiro Ushiku, Akihito Yamamoto, Takashi Nakao | 2006-06-20 |
| 6944572 | Apparatus for predicting life of rotary machine and equipment using the same | Yukihiro Ushiku, Tsunetoshi Arikado, Takashi Nakao, Yuuichi Mikata | 2005-09-13 |
| 6937963 | Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff | Ken Ishii, Takashi Nakao, Yukihiro Ushiku | 2005-08-30 |
| 6909993 | Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system | Takashi Nakao, Yukihiro Ushiku, Hiroshi Akahori, Ken Ishii | 2005-06-21 |
| 6898551 | System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus | Yukihiro Ushiku, Akihito Yamamoto, Takashi Nakao, Takeo Furuhata | 2005-05-24 |
| 6885972 | Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system | Yukihiro Ushiku, Takeo Furuhata, Takashi Nakao, Ken Ishii | 2005-04-26 |
| 6865513 | Method for predicting life of rotary machine and determining repair timing of rotary machine | Yukihiro Ushiku, Tsunetoshi Arikado, Takashi Nakao, Yuuichi Mikata | 2005-03-08 |
| 6766275 | Method for diagnosing life of manufacturing equipment using rotary machine | Yukihiro Ushiku, Ken Ishii, Takashi Nakao | 2004-07-20 |
| 6008110 | Semiconductor substrate and method of manufacturing same | Yoshiaki Matsushita, Yoko Inoue | 1999-12-28 |
| 5951755 | Manufacturing method of semiconductor substrate and inspection method therefor | Moriya Miyashita, Masanobu Ogino, Tadahide Hoshi, Masanori Numano, Akiko Sekihara +1 more | 1999-09-14 |
| 5738942 | Semiconductor silicon wafer and process for producing it | Atsuko Kubota, Masakatu Kojima, Norihiko Tsuchiya, Masanori Numano, Yoshihiro Ueno | 1998-04-14 |
| 5731247 | Method for manufacturing a semiconductor device including pre-oxidation process | Yoshihiro Ueno, Tsutomu Amai | 1998-03-24 |
| 5534294 | Process for producing Semiconductor silicon wafer | Atsuko Kubota, Masakatu Kojima, Norihiko Tsuchiya, Masanori Numano, Yoshihiro Ueno | 1996-07-09 |
| 5508800 | Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate | Moriya Miyashita, Hachiro Hiratsuka, Atsuko Kubota, Masanori Numano, Hiroyuki Fukui | 1996-04-16 |
| 5502331 | Semiconductor substrate containing bulk micro-defect | Yoko Inoue | 1996-03-26 |
| 5378652 | Method of making a through hole in multi-layer insulating films | Yuuichi Mikata, Toshiro Usami | 1995-01-03 |
| 5356830 | Semiconductor device and its manufacturing method | Susumu Yoshikawa, Satoshi Maeda, Shizuo Sawada | 1994-10-18 |
| 5291058 | Semiconductor device silicon via fill formed in multiple dielectric layers | Yuuichi Mikata, Toshiro Usami | 1994-03-01 |
| 5246500 | Vapor phase epitaxial growth apparatus | Yoshiaki Matsushita | 1993-09-21 |