Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183433 | Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer | Sayaka MAKISE, Shuichi Samata, Noritomo Mitsugi | 2021-11-23 |
| 7719260 | Method for pre-treating epitaxial layer, method for evaluating epitaxial layer, and apparatus for evaluating epitaxial layer | Shinjirou Uchida | 2010-05-18 |
| 7618833 | Method for pre-treating epitaxial layer, method for evaluating epitaxial layer, and apparatus for evaluating epitaxial layer | Shinjirou Uchida | 2009-11-17 |