Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935510 | Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer | Kazutaka Eriguchi, Shuichi Samata, Noritomo Mitsugi | 2021-03-02 |
| 10872768 | Method of manufacturing epitaxial silicon wafer, epitaxial silicon wafer, and method of manufacturing solid-state image sensing device | — | 2020-12-22 |
| 10676840 | Method of evaluating manufacturing process of silicon material and manufacturing method of silicon material | Noritomo Mitsugi, Kazutaka Eriguchi, Shuichi Samata | 2020-06-09 |