Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8232197 | Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed | Makoto Honda, Kaori Yomogihara, Kazuhiro Murakami, Takahito Nagamatsu, Hideaki Harakawa +3 more | 2012-07-31 |
| 7605076 | Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed | Makoto Honda, Kaori Yomogihara, Kazuhiro Murakami, Takahito Nagamatsu, Hideaki Harakawa +3 more | 2009-10-20 |
| 6222252 | Semiconductor substrate and method for producing the same | Moriya Miyashita | 2001-04-24 |
| 5951755 | Manufacturing method of semiconductor substrate and inspection method therefor | Moriya Miyashita, Masanobu Ogino, Tadahide Hoshi, Shuichi Samata, Akiko Sekihara +1 more | 1999-09-14 |
| 5738942 | Semiconductor silicon wafer and process for producing it | Atsuko Kubota, Masakatu Kojima, Norihiko Tsuchiya, Shuichi Samata, Yoshihiro Ueno | 1998-04-14 |
| 5739575 | Dielectrically isolated substrate and method for manufacturing the same | Norihiko Tsuchiya, Hiroyasu Kubota, Yoshiaki Matsushita, Yoshiki Hayashi, Yukihiro Ushiku +4 more | 1998-04-14 |
| 5675176 | Semiconductor device and a method for manufacturing the same | Yukihiro Ushiku, Atsushi Yagishita, Satoshi Inaba, Minoru Takahashi, Yoshiki Hayashi +4 more | 1997-10-07 |
| 5534294 | Process for producing Semiconductor silicon wafer | Atsuko Kubota, Masakatu Kojima, Norihiko Tsuchiya, Shuichi Samata, Yoshihiro Ueno | 1996-07-09 |
| 5508800 | Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate | Moriya Miyashita, Hachiro Hiratsuka, Atsuko Kubota, Shuichi Samata, Hiroyuki Fukui | 1996-04-16 |