Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8232197 | Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed | Makoto Honda, Kazuhiro Murakami, Masanori Numano, Takahito Nagamatsu, Hideaki Harakawa +3 more | 2012-07-31 |
| 7638439 | Peripheral processing method and method of manufacturing a semiconductor device | Takeo Kubota, Atsushi Shigeta, Makoto Honda, Hirokazu Ezawa | 2009-12-29 |
| 7605076 | Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed | Makoto Honda, Kazuhiro Murakami, Masanori Numano, Takahito Nagamatsu, Hideaki Harakawa +3 more | 2009-10-20 |