Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777424 | Method for manufacturing semiconductor device | — | 2020-09-15 |
| 8748289 | Method for manufacturing semiconductor device | Masayuki Nakanishi, Tetsuji Togawa, Kenya Ito, Masaya Seki, Kenji Iwade | 2014-06-10 |
| 8641480 | Polishing apparatus and polishing method | Masayuki Nakanishi, Tetsuji Togawa, Kenya Ito, Masaya Seki, Kenji Iwade +1 more | 2014-02-04 |
| 8445360 | Method for manufacturing semiconductor device | Masayuki Nakanishi, Tetsuji Togawa, Kenya Ito, Masaya Seki, Kenji Iwade | 2013-05-21 |
| 7888139 | Fabricating method of nonvolatile semiconductor storage apparatus | Yukiteru Matsui, Yoshikuni Tateyama, Hiroyuki Kanaya, Yoshihiro Minami | 2011-02-15 |
| 7744445 | Polishing apparatus and polishing method | Atsushi Shigeta, Gen Toyota, Tamami Takahashi, Daisaku Fukuoka, Kenya Ito | 2010-06-29 |
| 7638439 | Peripheral processing method and method of manufacturing a semiconductor device | Atsushi Shigeta, Kaori Yomogihara, Makoto Honda, Hirokazu Ezawa | 2009-12-29 |
| 7354861 | Polishing method and polishing liquid | Kenro Nakamura, Gaku Minamihaba | 2008-04-08 |
| 7172492 | Polishing method and polishing system | — | 2007-02-06 |
| 7014529 | Substrate processing method and substrate processing apparatus | Atsushi Shigeta, Gen Toyota | 2006-03-21 |
| 6984532 | Method of judging residual film by optical measurement | Atsushi Shigeta | 2006-01-10 |
| 6743645 | Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device | Atsushi Shigeta | 2004-06-01 |
| 6429134 | Method of manufacturing semiconductor device | Hiroyuki Yano, Kenro Nakamura | 2002-08-06 |