Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12199066 | Semiconductor device and method for producing the same | Satoshi Hongo, Tatsuo Migita, Susumu Yamamoto, Tsutomu Fujita, Eiichi SHIN +3 more | 2025-01-14 |
| 11830847 | Manufacturing method of semiconductor device and semiconductor device | — | 2023-11-28 |
| 10818501 | Method for manufacturing semiconductor device | Takashi Shirono, Eiji Takano, Eiichi SHIN | 2020-10-27 |
| 9935232 | Method of manufacturing semiconductor device | Shouta Inoue, Susumu Yamamoto, Takamasa Tanaka, Takamitsu Yoshida, Kazumasa Tanida | 2018-04-03 |
| 8292694 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Kenji Iwade, Yoshikuni Tateyama | 2012-10-23 |
| 7883394 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Kenji Iwade, Yoshikuni Tateyama | 2011-02-08 |
| 7767472 | Substrate processing method and substrate processing apparatus | Atsushi Shigeta, Hiroyuki Yano, Kunio Oishi, Kenya Ito, Masayuki Nakanishi +1 more | 2010-08-03 |
| 7744445 | Polishing apparatus and polishing method | Takeo Kubota, Atsushi Shigeta, Tamami Takahashi, Daisaku Fukuoka, Kenya Ito | 2010-06-29 |
| 7419420 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Kenji Iwade, Yoshikuni Tateyama | 2008-09-02 |
| 7241205 | Method of processing a substrate | Atsushi Shigeta, Hiroyuki Yano | 2007-07-10 |
| 7217662 | Method of processing a substrate | Atsushi Shigeta, Hiroyuki Yano | 2007-05-15 |
| 7014529 | Substrate processing method and substrate processing apparatus | Takeo Kubota, Atsushi Shigeta | 2006-03-21 |