Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121677 | Manufacturing method of semiconductor device | Yukiteru Matsui, Takahiko Kawasaki, Akifumi GAWASE | 2018-11-06 |
| 9558961 | Manufacturing method of semiconductor device | Akifumi GAWASE, Yukiteru Matsui, Takahiko Kawasaki | 2017-01-31 |
| 8748289 | Method for manufacturing semiconductor device | Masayuki Nakanishi, Tetsuji Togawa, Kenya Ito, Masaya Seki, Takeo Kubota | 2014-06-10 |
| 8641480 | Polishing apparatus and polishing method | Masayuki Nakanishi, Tetsuji Togawa, Kenya Ito, Masaya Seki, Takeo Kubota +1 more | 2014-02-04 |
| 8492276 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Taichi Abe, Hirotaka Shida, Akihiro Takemura, Mitsuru Meno, Shinichi Hirasawa +1 more | 2013-07-23 |
| 8445360 | Method for manufacturing semiconductor device | Masayuki Nakanishi, Tetsuji Togawa, Kenya Ito, Masaya Seki, Takeo Kubota | 2013-05-21 |
| 8292694 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Yoshikuni Tateyama | 2012-10-23 |
| 7883394 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Yoshikuni Tateyama | 2011-02-08 |
| 7419420 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Yoshikuni Tateyama | 2008-09-02 |