Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432907 | Semiconductor device and semiconductor memory device | Shuntaro Yamashita | 2025-09-30 |
| 12381144 | Semiconductor device and method of manufacturing the same | Yimin Liu | 2025-08-05 |
| 12065725 | Film forming apparatus and film forming method | Yuta Konno, Toshihiko Nagase, Atsuko Sakata, Kohei Nagata, Ryohei Kitao +1 more | 2024-08-20 |
| 11978807 | Semiconductor device and semiconductor memory device | Atsuko Sakata | 2024-05-07 |
| 11883926 | Polishing pad, semiconductor fabricating device and fabricating method of semiconductor device | Takahiko Kawasaki, Yukiteru Matsui | 2024-01-30 |
| 11534886 | Polishing device, polishing head, polishing method, and method of manufacturing semiconductor device | Mikiya SAKASHITA, Yukiteru Matsui | 2022-12-27 |
| 11502204 | Semiconductor device and semiconductor memory device | Atsuko Sakata | 2022-11-15 |
| 11349033 | Semiconductor device and semiconductor memory device | Tomoki ISHIMARU, Shinji Mori, Kazuhiro Matsuo, Keiichi Sawa | 2022-05-31 |
| 10998283 | Semiconductor device production method | Takahiko Kawasaki, Yukiteru Matsui | 2021-05-04 |
| 10991588 | Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus | Yukiteru Matsui, Takahiko Kawasaki | 2021-04-27 |
| 10985027 | Method for manufacturing semiconductor device | Yukiteru Matsui, Mikiya SAKASHITA | 2021-04-20 |
| 10850363 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yukiteru Matsui, Takahiko Kawasaki, Shuji Suzuki, Tsutomu Miki | 2020-12-01 |
| 10319734 | Semiconductor memory device having air gap | Yasuhito Yoshimizu, Kei Watanabe, Shinya Arai | 2019-06-11 |
| 10283383 | Planarization method and planarization apparatus | Yukiteru Matsui, Gaku Minamihaba, Hajime Eda | 2019-05-07 |
| 10195716 | Dresser, method of manufacturing dresser, and method of manufacturing semiconductor device | Takahiko Kawasaki, Yukiteru Matsui | 2019-02-05 |
| 10121677 | Manufacturing method of semiconductor device | Yukiteru Matsui, Takahiko Kawasaki, Kenji Iwade | 2018-11-06 |
| 10079153 | Semiconductor storage device | Yukiteru Matsui, Takahiko Kawasaki | 2018-09-18 |
| 10010997 | Abrasive cloth and polishing method | Yukiteru Matsui, Takahiko Kawasaki, Yosuke OTSUKA, Hajime Eda | 2018-07-03 |
| 10008390 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yukiteru Matsui, Kyoichi Suguro, Takahiko Kawasaki | 2018-06-26 |
| 9837279 | Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus | Yukiteru Matsui, Takahiko Kawasaki | 2017-12-05 |
| 9646989 | Three-dimensional memory device | Yasuhito Yoshimizu, Yuya Akeboshi | 2017-05-09 |
| 9558961 | Manufacturing method of semiconductor device | Yukiteru Matsui, Kenji Iwade, Takahiko Kawasaki | 2017-01-31 |
| 9174322 | Manufacturing method of semiconductor device | Yukiteru Matsui, Hajime Eda | 2015-11-03 |
| 9144879 | Planarization method and planarization apparatus | Yukiteru Matsui, Gaku Minamihaba, Hajime Eda | 2015-09-29 |
| 9012246 | Manufacturing method of semiconductor device and polishing apparatus | Hajime Eda, Gaku Minamihaba, Yukiteru Matsui | 2015-04-21 |