Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283383 | Planarization method and planarization apparatus | Akifumi GAWASE, Yukiteru Matsui, Gaku Minamihaba | 2019-05-07 |
| 10010997 | Abrasive cloth and polishing method | Akifumi GAWASE, Yukiteru Matsui, Takahiko Kawasaki, Yosuke OTSUKA | 2018-07-03 |
| 9174322 | Manufacturing method of semiconductor device | Yukiteru Matsui, Akifumi GAWASE | 2015-11-03 |
| 9144879 | Planarization method and planarization apparatus | Akifumi GAWASE, Yukiteru Matsui, Gaku Minamihaba | 2015-09-29 |
| 9012246 | Manufacturing method of semiconductor device and polishing apparatus | Gaku Minamihaba, Yukiteru Matsui, Akifumi GAWASE | 2015-04-21 |
| 8754433 | Semiconductor device and method of manufacturing the same | Yukiteru Matsui, Gaku Minamihaba, Masayoshi Iwayama, Minoru Amano, Masatoshi Yoshikawa +3 more | 2014-06-17 |
| 8575030 | Semiconductor device manufacturing method | Gaku Minamihaba, Yukiteru Matsui, Nobuyuki Kurashima | 2013-11-05 |
| 8114776 | Method of manufacturing semiconductor device | Yukiteru Matsui, Atsushi Shigeta, Takatoshi Ono, Satoko Seta | 2012-02-14 |