Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300499 | Polishing solution, polishing apparatus, and polishing method | Mikiya SAKASHITA | 2025-05-13 |
| 11986920 | Polishing method, polishing agent and cleaning agent for polishing | Mikiya SAKASHITA, Yumiko Kataoka | 2024-05-21 |
| 11883926 | Polishing pad, semiconductor fabricating device and fabricating method of semiconductor device | Takahiko Kawasaki, Akifumi GAWASE | 2024-01-30 |
| 11534886 | Polishing device, polishing head, polishing method, and method of manufacturing semiconductor device | Mikiya SAKASHITA, Akifumi GAWASE | 2022-12-27 |
| 10998283 | Semiconductor device production method | Takahiko Kawasaki, Akifumi GAWASE | 2021-05-04 |
| 10991588 | Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus | Akifumi GAWASE, Takahiko Kawasaki | 2021-04-27 |
| 10985027 | Method for manufacturing semiconductor device | Akifumi GAWASE, Mikiya SAKASHITA | 2021-04-20 |
| 10850363 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Takahiko Kawasaki, Akifumi GAWASE, Shuji Suzuki, Tsutomu Miki | 2020-12-01 |
| 10283383 | Planarization method and planarization apparatus | Akifumi GAWASE, Gaku Minamihaba, Hajime Eda | 2019-05-07 |
| 10195716 | Dresser, method of manufacturing dresser, and method of manufacturing semiconductor device | Takahiko Kawasaki, Akifumi GAWASE | 2019-02-05 |
| 10121677 | Manufacturing method of semiconductor device | Takahiko Kawasaki, Akifumi GAWASE, Kenji Iwade | 2018-11-06 |
| 10079153 | Semiconductor storage device | Akifumi GAWASE, Takahiko Kawasaki | 2018-09-18 |
| 10010997 | Abrasive cloth and polishing method | Akifumi GAWASE, Takahiko Kawasaki, Yosuke OTSUKA, Hajime Eda | 2018-07-03 |
| 10008390 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Kyoichi Suguro, Akifumi GAWASE, Takahiko Kawasaki | 2018-06-26 |
| 9937602 | Substrate processing method | Yosuke OTSUKA, Masako Kodera | 2018-04-10 |
| 9837279 | Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus | Akifumi GAWASE, Takahiko Kawasaki | 2017-12-05 |
| 9558961 | Manufacturing method of semiconductor device | Akifumi GAWASE, Kenji Iwade, Takahiko Kawasaki | 2017-01-31 |
| 9196501 | Method for chemical planarization and chemical planarization apparatus | Masako Kodera | 2015-11-24 |
| 9174322 | Manufacturing method of semiconductor device | Akifumi GAWASE, Hajime Eda | 2015-11-03 |
| 9144879 | Planarization method and planarization apparatus | Akifumi GAWASE, Gaku Minamihaba, Hajime Eda | 2015-09-29 |
| 9012246 | Manufacturing method of semiconductor device and polishing apparatus | Hajime Eda, Gaku Minamihaba, Akifumi GAWASE | 2015-04-21 |
| 8936729 | Planarizing method | Akifumi GAWASE | 2015-01-20 |
| 8871644 | Method of manufacturing semiconductor device | Akifumi GAWASE, Gaku Minamihaba | 2014-10-28 |
| 8754433 | Semiconductor device and method of manufacturing the same | Gaku Minamihaba, Hajime Eda, Masayoshi Iwayama, Minoru Amano, Masatoshi Yoshikawa +3 more | 2014-06-17 |
| 8740667 | Polishing method and polishing apparatus | Masako Kodera | 2014-06-03 |