Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300499 | Polishing solution, polishing apparatus, and polishing method | Yukiteru Matsui | 2025-05-13 |
| 11986920 | Polishing method, polishing agent and cleaning agent for polishing | Yumiko Kataoka, Yukiteru Matsui | 2024-05-21 |
| 11534886 | Polishing device, polishing head, polishing method, and method of manufacturing semiconductor device | Yukiteru Matsui, Akifumi GAWASE | 2022-12-27 |
| 10985027 | Method for manufacturing semiconductor device | Akifumi GAWASE, Yukiteru Matsui | 2021-04-20 |