Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8936729 | Planarizing method | Yukiteru Matsui | 2015-01-20 |
| 8871644 | Method of manufacturing semiconductor device | Yukiteru Matsui, Gaku Minamihaba | 2014-10-28 |
| 8703004 | Method for chemical planarization and chemical planarization apparatus | Yukiteru Matsui, Masako Kodera, Hiroshi Tomita, Gaku Minamihaba | 2014-04-22 |
| 7781301 | Method of fabricating semiconductor device | Kei Watanabe, Kenichi Otsuka | 2010-08-24 |