Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865502 | Semiconductor device and method of manufacturing the same semiconductor device | — | 2018-01-09 |
| 9673147 | Semiconductor device and manufacturing method thereof | Hirokazu Ezawa | 2017-06-06 |
| 9287225 | Semiconductor device and manufacturing method thereof | Hirokazu Ezawa | 2016-03-15 |
| 9123717 | Semiconductor device manufacturing method and manufacturing apparatus | Mitsuyoshi Endo, Kazuyuki Higashi, Takashi Shirono | 2015-09-01 |
| 7367873 | Substrate processing apparatus | You Ishii, Masayuki Nakanishi | 2008-05-06 |
| 7354861 | Polishing method and polishing liquid | Takeo Kubota, Gaku Minamihaba | 2008-04-08 |
| 7351131 | Method for manufacturing semiconductor device and polishing apparatus | Naoto Miyashita, Takashi Yoda, Katsuya Okumura | 2008-04-01 |
| 7066787 | Substrate processing apparatus | Masayuki Nakanishi, You Ishii | 2006-06-27 |
| 6933234 | Method for manufacturing semiconductor device and polishing apparatus | Naoto Miyashita, Takashi Yoda, Katsuya Okumura | 2005-08-23 |
| 6620336 | Polishing pad, polishing apparatus and polishing method | — | 2003-09-16 |
| 6429134 | Method of manufacturing semiconductor device | Takeo Kubota, Hiroyuki Yano | 2002-08-06 |
| 6239032 | Polishing method | Hiroyuki Yano | 2001-05-29 |
| 6096631 | Method of manufacturing semiconductor device | Rempei Nakata, Yusuke Kohyama, Nobuo Hayasaka | 2000-08-01 |