Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269540 | Ion implantation apparatus and method of determining state of ion implantation apparatus | Masayuki Jinguuji, Kei Hattori, Keiji Fujita | 2016-02-23 |
| 8232197 | Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed | Makoto Honda, Kaori Yomogihara, Kazuhiro Murakami, Masanori Numano, Hideaki Harakawa +3 more | 2012-07-31 |
| 7605076 | Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed | Makoto Honda, Kaori Yomogihara, Kazuhiro Murakami, Masanori Numano, Hideaki Harakawa +3 more | 2009-10-20 |
| 5641581 | Semiconductor device | Yukio Nishiyama, Rempei Nakata, Nobuo Hayasaka, Haruo Okano, Riichirou Aoki +3 more | 1997-06-24 |
| 5429995 | Method of manufacturing silicon oxide film containing fluorine | Yukio Nishiyama, Rempei Nakata, Nobuo Hayasaka, Haruo Okano, Riichirou Aoki +3 more | 1995-07-04 |