Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269540 | Ion implantation apparatus and method of determining state of ion implantation apparatus | Masayuki Jinguuji, Kei Hattori, Takahito Nagamatsu | 2016-02-23 |
| 7933189 | Focus optical system and optical disc master exposure apparatus | Takeshi Omori, Takaaki Kassai, Kenji Maebara, Hiroaki Ashiwa | 2011-04-26 |
| 7534717 | Method of manufacturing semiconductor device | Hideshi Miyajima, Hideaki Masuda, Rempei Nakata, Miyoko Shimada | 2009-05-19 |
| 7462569 | Method of manufacturing semiconductor device | Hideshi Miyajima | 2008-12-09 |
| 7129175 | Method of manufacturing semiconductor device | Hideshi Miyajima, Kazuyuki Higashi, Toshiaki Hasegawa, Kiyotaka Tabuchi | 2006-10-31 |
| 7094681 | Semiconductor device fabrication method | Rempei Nakata, Hideshi Miyajima | 2006-08-22 |
| 6344420 | Plasma processing method and plasma processing apparatus | Hideshi Miyajima | 2002-02-05 |
| 6087539 | Process for producing an ether compound | Hirotaka Yamasaki, Akihisa Ogawa, Shigeru Kamimori, Yoshikazu Hirao, Tokuyuki Yoshimoto | 2000-07-11 |
| 5748288 | Lighting assembly, exposure apparatus and exposure method employing the lighting assembly | Hiroyuki Nagano, Takashi Inoue, Hiroshi Yamashita, Takeo Sato | 1998-05-05 |
| 5420041 | Method of acid value determination by infrared absorption | Kazuhiko Matsushita, Hiroshi Yokota, Akihiro Tsukamoto | 1995-05-30 |
| 5355814 | Gasifier burner for powdered solid fuels and method for using the same | Nobumasa Kemori, Kimiaki Utsunomiya, Hitoshi Takano | 1994-10-18 |