Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735340 | Method of manufacturing an electronic component | Hidekazu Oishibashi, Yuichiro Nagamine | 2017-08-15 |
| 9543220 | Substrate processing apparatus, semiconductor device manufacturing method, substrate processing method, and recording medium | — | 2017-01-10 |
| 9479135 | Method for manufacturing piezoelectric vibration device | Yuichiro Nagamine | 2016-10-25 |
| 9054784 | Signal switching apparatus | Shuichi Takeda, Shinichi Inayama | 2015-06-09 |
| 6054818 | Electric motor vehicle | Kunio Tabata, Minoru Kozaki, Issei Yamakoshi, Kunihiko Takagi, Yoshikazu Koike +2 more | 2000-04-25 |
| 6037726 | Electric motor vehicle | Kunio Tabata, Minoru Kozaki, Issei Yamakoshi, Kunihiko Takagi, Yoshikazu Koike +2 more | 2000-03-14 |
| 5900686 | Electric motor vehicle | Kunio Tabata, Minoru Kozaki, Issei Yamakoshi, Kunihiko Takagi, Yoshikazu Koike +2 more | 1999-05-04 |
| 5748288 | Lighting assembly, exposure apparatus and exposure method employing the lighting assembly | Hiroyuki Nagano, Takashi Inoue, Hiroshi Yamashita, Keiji Fujita | 1998-05-05 |
| 5621822 | Method of detecting focus position of object from variable gray level image of object | Noriaki Yukawa, Satoru Kimura | 1997-04-15 |
| 5231467 | Reflective alignment position signal producing apparatus | Hiroyuki Takeuchi, Masaki Yamamoto, Yoshiyuki Sugiyama, Shinichiro Aoki | 1993-07-27 |
| 5227838 | Exposure system | Yoshito Nakanishi, Nobuaki Furuya, Takeo Miyata, Shinichi Mizuguchi | 1993-07-13 |
| 5201952 | Method and apparatus for applying a uniform adhesive coat to a resin-coated mandrel | Masakazu Yahagi, Masahiro Ebisawa | 1993-04-13 |
| 5194744 | Compact reticle/wafer alignment system | Shinichiro Aoki, Masaki Yamamoto, Hiroyuki Takeuchi, Nobuhiro Araki, Yoshiyuki Sugiyama | 1993-03-16 |
| 5174239 | Sealed-type aquarium device | — | 1992-12-29 |
| 5155557 | Optical alignment detection apparatus | Toshiyuki Iwazawa, Masaki Yamamoto, Yoshihito Nakanishi | 1992-10-13 |
| 5062705 | Apparatus for evaluating a lens | Masaki Yamamoto, Shinichiro Aoki, Yoshiyuki Sugiyama, Yoshito Nakanishi, Hiroyuki Takeuchi | 1991-11-05 |
| 5053628 | Position signal producing apparatus for water alignment | Masaki Yamamoto, Yoshiyuki Sugiyama, Shinichiro Aoki, Hiroyuki Takeuchi | 1991-10-01 |
| 5025168 | Alignment apparatus including three beams and three gratings | Shinichiro Aoki, Katsumasa Yamaguchi, Masaki Yamamoto | 1991-06-18 |
| 5005938 | Optical wavelength convertical apparatus | Tatsuo Itoh, Shinichi Mizuguchi, Keishi Kubo | 1991-04-09 |
| 4948238 | Optical projection system | Nobuhiro Araki, Koichi Kawata, Noboru Nomura, Keisuke Koga | 1990-08-14 |
| 4870289 | Apparatus for controlling relation in position between a photomask and a wafer | Shinichiro Aoki, Katsumasa Yamaguchi, Tadashi Kaneko, Noboru Nomura, Keisuke Koga +1 more | 1989-09-26 |
| 4861148 | Projection optical system for use in precise copy | Nobuhiro Araki, Koichi Kawata, Noboru Nomura, Atushi Ueno, Shotaro Yoshida | 1989-08-29 |
| 4844568 | Scanning type projection exposure system | Masaki Suzuki, Hiroyuki Nagano, Toshiyuki Watanabe | 1989-07-04 |
| 4771157 | Electrical discharge machining apparatus for forming minute holes in a workpiece | Nobuhiro Araki, Hisato Matsushita, Koichi Kawata | 1988-09-13 |
| 4757354 | Projection optical system | Nobuhiro Araki, Koichi Kawata, Noboru Nomura, Atsushi Ueno, Shotaro Yoshida | 1988-07-12 |