Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9268325 | Manufacturing process monitoring system and manufacturing process monitoring method | — | 2016-02-23 |
| 7463941 | Quality control system, quality control method, and method of lot-to-lot wafer processing | Akira Ogawa, Yukihiro Ushiku | 2008-12-09 |
| 7324855 | Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server | Yukihiro Ushiku, Hidenori Kakinuma, Tsutomu Miki, Junji Sugamoto, Akira Ogawa +2 more | 2008-01-29 |
| 6780657 | Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers | Akira Soga, Yoshiaki Akama | 2004-08-24 |
| 6541287 | Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers | Akira Soga, Yoshiaki Akama | 2003-04-01 |