Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012858 | Method of fabricating semiconductor device | Masahiko Murano, Ichiro Mizushima, Tsutomu Sato, Shinji Mori, Hiroshi Itokawa | 2011-09-06 |
| 6929991 | Reliable semiconductor device and method of manufacturing the same | Yuuichi Mikata, Hiroshi Akahori | 2005-08-16 |
| 6772045 | System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device | Masayuki Tanaka, Masaki Kamimura, Hiroshi Akahori, Ichiro Mizushima, Takashi Nakao +4 more | 2004-08-03 |
| 6713824 | Reliable semiconductor device and method of manufacturing the same | Yuuichi Mikata, Hiroshi Akahori | 2004-03-30 |
| 6251801 | Method and apparatus for manufacturing semiconductor device | Kazuo Saki | 2001-06-26 |