Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9750087 | Heat treatment apparatus | Yumiko Kawano | 2017-08-29 |
| 8674273 | Heat treatment apparatus | Yumiko Kawano | 2014-03-18 |
| 8658951 | Heat treatment apparatus | Yumiko Kawano | 2014-02-25 |
| 7648610 | Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate | Taro Komiya, Hatsuo Osada, Shigetoshi Hosaka, Masayuki Tomoyasu | 2010-01-19 |
| 6436193 | Gas processing apparatus baffle member, and gas processing method | Shigeru Kasai, Teruo Iwata, Taro Komiya | 2002-08-20 |
| 5972114 | Film deposition apparatus with anti-adhesion film and chamber cooling means | Mitsuhiro Tachibana, Sumi Tanaka | 1999-10-26 |
| 5711815 | Film forming apparatus and film forming method | Hideki Lee | 1998-01-27 |
| 5525160 | Film deposition processing device having transparent support and transfer pins | Sumi Tanaka, Yuichiro Fujikawa, Hideki Lee | 1996-06-11 |
| 5332442 | Surface processing apparatus | Masao Kubodera, Masaki Narushima, Masahito Ozawa, Hiromi Kumagai, Sumi Tanaka | 1994-07-26 |