Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9209010 | Substrate cleaning method and substrate cleaning device | Hidefumi Matsui, Tsuyoshi Moriya | 2015-12-08 |
| 8940638 | Substrate wiring method and semiconductor manufacturing device | Satohiko Hoshino, Hidefumi Matsui | 2015-01-27 |
| 8635655 | Input switching apparatus and input switching method of audio/video signal, and audio/video system | — | 2014-01-21 |
| 8168946 | Charged particle separation apparatus and charged particle bombardment apparatus | Koichi Mori, Isao Yamada, Noriaki Toyoda | 2012-05-01 |
| 7393172 | Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device | Hiroaki Saeki, Tetsu Osawa, Yasushi Taniyama, Shuuji Hagiwara | 2008-07-01 |
| 7198448 | Vacuum process system | Jun Ozawa, Jun Hirose | 2007-04-03 |
| 7090741 | Semiconductor processing system | Hiroaki Saeki | 2006-08-15 |
| 7025554 | Vacuum process system | Jun Ozawa, Jun Hirose | 2006-04-11 |
| 6951587 | Ceramic heater system and substrate processing apparatus having the same installed therein | — | 2005-10-04 |
| 6802934 | Processing apparatus | Hiroaki Saeki, Keiichi Matsushima, Teruo Asakawa | 2004-10-12 |
| 6702865 | Alignment processing mechanism and semiconductor processing device using it | Masahito Ozawa | 2004-03-09 |
| 5474410 | Multi-chamber system provided with carrier units | Masahito Ozawa, Masami Mizukami, Masanobu Kanazashi, Toshihiko Takasoe, Masao Kubodera | 1995-12-12 |
| 5332442 | Surface processing apparatus | Masao Kubodera, Masahito Ozawa, Hiromi Kumagai, Tomihiro Yonenaga, Sumi Tanaka | 1994-07-26 |
| 5065495 | Method for holding a plate-like member | Itaru Takao | 1991-11-19 |
| 4955590 | Plate-like member receiving apparatus | Itaru Takao | 1990-09-11 |
| 4941800 | Transfer apparatus for plate-like member | Hisashi Koike, Itaru Takao, Kiyoshi Takekoshi | 1990-07-17 |