Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851289 | Conveyance system for transferring frame wafer | Hiroaki Nakamura, Toshihiro Kawai, Kosuke Sugiura, Gengoro Ogura | 2023-12-26 |
| 11823923 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2023-11-21 |
| 11823934 | Wafer stocker | Toshihiro Kawai | 2023-11-21 |
| 11710652 | Transport system | Toshihiro Kawai, Hiroaki Nakamura, Gengoro Ogura, Kosuke Sugiura | 2023-07-25 |
| 11658047 | Exhaust nozzle unit, load port, and EFEM | Atsushi Suzuki, Tomoya Mizutani | 2023-05-23 |
| 11610797 | Wafer stocker | Toshihiro Kawai | 2023-03-21 |
| 11424145 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2022-08-23 |
| 11139188 | Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus | Toshimitsu Morihana | 2021-10-05 |
| 10947063 | Load port | Atsushi Suzuki | 2021-03-16 |
| 10930537 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Munekazu Komiya, Takashi Shigeta | 2021-02-23 |
| 10923372 | Gas injection device | Toshihiro Kawai, Munekazu Komiya, Takashi Shigeta | 2021-02-16 |
| 10672632 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2020-06-02 |
| 10658217 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2020-05-19 |
| 10586723 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Munekazu Komiya, Takashi Shigeta | 2020-03-10 |
| 10501271 | Load port | Atsushi Suzuki | 2019-12-10 |
| 9704727 | EFEM | Mikio Segawa, Mitsuo Natsume, Atsushi Suzuki, Toshihiro Kawai, Kunihiko Sato | 2017-07-11 |
| 9412634 | Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM | Mikio Segawa, Shin Kawahisa, Mitsuo Natsume | 2016-08-09 |
| 8540473 | Load port | Fuminori Asa | 2013-09-24 |
| 7987742 | Transportation apparatus and tension adjustment method of belt in the same | Sachio Tachibana | 2011-08-02 |
| 7393172 | Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device | Hiroaki Saeki, Masaki Narushima, Tetsu Osawa, Shuuji Hagiwara | 2008-07-01 |
| 7279067 | Port structure in semiconductor processing system | Tetsuo Yoshida, Yoshiaki Sasaki, Hiroaki Saeki, Hiroshi Takizawa | 2007-10-09 |
| 6984097 | Mounting/demounting device for wafer carrier lid | Hiroaki Saeki, Yoshiaki Sasaki, Keiichi Matsushima, Shuuji Hagiwara | 2006-01-10 |
| 6676356 | Device for attaching target substrate transfer container to semiconductor processing apparatus | Hiroaki Saeki, Yoshiaki Sasaki | 2004-01-13 |
| 6540869 | Semiconductor processing system | Hiroaki Saeki | 2003-04-01 |