Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9916997 | End structure of nozzle, purging device, and load port | Toshimitsu Morihana, Yuki Matsumoto | 2018-03-13 |
| 9704727 | EFEM | Mikio Segawa, Yasushi Taniyama, Atsushi Suzuki, Toshihiro Kawai, Kunihiko Sato | 2017-07-11 |
| 9685359 | Load port device | Manabu Funato, Mitsutoshi Ochiai | 2017-06-20 |
| 9412634 | Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM | Mikio Segawa, Yasushi Taniyama, Shin Kawahisa | 2016-08-09 |
| 9239228 | Wafer mapping apparatus and load port including same | Masahiro Osawa, Toshimitsu Morihana, Mitsutoshi Ochiai | 2016-01-19 |
| 9174253 | Purge nozzle unit, purge apparatus and load port | Atsushi Suzuki | 2015-11-03 |
| 8821098 | Load port | Shin Kawahisa, Takumi Mizokawa | 2014-09-02 |
| 8596312 | Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method | Mitsutoshi Ochiai, Takumi Mizokawa | 2013-12-03 |
| 8444125 | Attaching apparatus for load port apparatus | — | 2013-05-21 |
| 7793906 | Clamping mechanism | — | 2010-09-14 |