Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412634 | Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM | Mikio Segawa, Yasushi Taniyama, Mitsuo Natsume | 2016-08-09 |
| 8821098 | Load port | Mitsuo Natsume, Takumi Mizokawa | 2014-09-02 |