Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704727 | EFEM | Yasushi Taniyama, Mitsuo Natsume, Atsushi Suzuki, Toshihiro Kawai, Kunihiko Sato | 2017-07-11 |
| 9412634 | Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM | Yasushi Taniyama, Shin Kawahisa, Mitsuo Natsume | 2016-08-09 |