Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362207 | EFEM | Gengoro Ogura | 2025-07-15 |
| 12201995 | Equipment front end module | Gengoro Ogura | 2025-01-21 |
| 12087606 | EFEM and method of controlling supply amount of inert gas | Masahiro Osawa | 2024-09-10 |
| 12055220 | Sealing equipment | Gengoro Ogura | 2024-08-06 |
| 12027398 | EFEM | Gengoro Ogura | 2024-07-02 |
| 12002693 | EFEM | Gengoro Ogura | 2024-06-04 |
| 11851289 | Conveyance system for transferring frame wafer | Hiroaki Nakamura, Kosuke Sugiura, Gengoro Ogura, Yasushi Taniyama | 2023-12-26 |
| 11823923 | Transfer chamber | Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama | 2023-11-21 |
| 11823934 | Wafer stocker | Yasushi Taniyama | 2023-11-21 |
| 11752998 | Vehicle control device, method, program, and vehicle | Toru Ono, Yasushi Kusaka, Shinichi Inoue | 2023-09-12 |
| 11710652 | Transport system | Hiroaki Nakamura, Gengoro Ogura, Kosuke Sugiura, Yasushi Taniyama | 2023-07-25 |
| 11664541 | Battery cell short circuit detection device, method, and storage medium | Shinichi Inoue, Yasushi Kusaka, Toru Ono | 2023-05-30 |
| 11610797 | Wafer stocker | Yasushi Taniyama | 2023-03-21 |
| 11584256 | Vehicle control device, control method, non-transitory storage medium, and vehicle | Shinichi Inoue, Toru Ono, Yasushi Kusaka | 2023-02-21 |
| 11495481 | EFEM | Gengoro Ogura | 2022-11-08 |
| 11447021 | Vehicle control apparatus, control method, non-transitory storage medium, and vehicle | Shinichi Inoue, Toru Ono, Yasushi Kusaka | 2022-09-20 |
| 11424145 | Transfer chamber | Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama | 2022-08-23 |
| 11322378 | Equipment front end module | Gengoro Ogura | 2022-05-03 |
| 11009066 | Double-row four-point contact ball bearing | Takao Terada | 2021-05-18 |
| 10930537 | Door opening/closing system, and load port equipped with door opening/closing system | Yasushi Taniyama, Munekazu Komiya, Takashi Shigeta | 2021-02-23 |
| 10923372 | Gas injection device | Yasushi Taniyama, Munekazu Komiya, Takashi Shigeta | 2021-02-16 |
| 10672632 | Transfer chamber | Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama | 2020-06-02 |
| 10658217 | Transfer chamber | Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama | 2020-05-19 |
| 10636680 | Robot transport device | Takashi Shigeta, Haruki Takeuchi, Yoshimasa Suda, Hisashi Gomi, Shigenori Ozaki | 2020-04-28 |
| 10586723 | Door opening/closing system, and load port equipped with door opening/closing system | Yasushi Taniyama, Munekazu Komiya, Takashi Shigeta | 2020-03-10 |