Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823923 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Yasushi Taniyama | 2023-11-21 |
| 11424145 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Yasushi Taniyama | 2022-08-23 |
| 10930537 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Yasushi Taniyama, Takashi Shigeta | 2021-02-23 |
| 10923372 | Gas injection device | Toshihiro Kawai, Yasushi Taniyama, Takashi Shigeta | 2021-02-16 |
| 10672632 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Yasushi Taniyama | 2020-06-02 |
| 10658217 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Yasushi Taniyama | 2020-05-19 |
| 10586723 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Yasushi Taniyama, Takashi Shigeta | 2020-03-10 |