Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362207 | EFEM | Toshihiro Kawai | 2025-07-15 |
| 12201995 | Equipment front end module | Toshihiro Kawai | 2025-01-21 |
| 12055220 | Sealing equipment | Toshihiro Kawai | 2024-08-06 |
| 12027398 | EFEM | Toshihiro Kawai | 2024-07-02 |
| 12002693 | EFEM | Toshihiro Kawai | 2024-06-04 |
| 11851289 | Conveyance system for transferring frame wafer | Hiroaki Nakamura, Toshihiro Kawai, Kosuke Sugiura, Yasushi Taniyama | 2023-12-26 |
| 11710652 | Transport system | Toshihiro Kawai, Hiroaki Nakamura, Kosuke Sugiura, Yasushi Taniyama | 2023-07-25 |
| 11495481 | EFEM | Toshihiro Kawai | 2022-11-08 |
| 11322378 | Equipment front end module | Toshihiro Kawai | 2022-05-03 |